Degradation of memory retention characteristics in DRAM chip by Si thinning for 3-D integration

Kangwook Lee, Seiya Tanikawa, Mariappine Murugesan, Hideki Naganuma, Haro Shimamoto, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds