Defect structure of epitaxial ZnO films on (0001) sapphire studied by transmission electron microscopy

S. H. Lim, D. Shindo, H. B. Kang, K. Nakamura

    Research output: Contribution to journalArticlepeer-review

    25 Citations (Scopus)

    Abstract

    ZnO film was grown on a (0001) sapphire substrate by electron cyclotron resonance-assisted molecular beam epitaxy (ECR-assisted MBE). Details of lattice defects such as threading dislocations and subgrain boundaries were analyzed on atomic scale. The overlapping manner of the ZnO film and the sapphire substrate was characterized taking into account moiré fringes of HREM images.

    Original languageEnglish
    Pages (from-to)506-510
    Number of pages5
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume19
    Issue number2
    DOIs
    Publication statusPublished - 2001 Mar 1

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Electrical and Electronic Engineering

    Fingerprint

    Dive into the research topics of 'Defect structure of epitaxial ZnO films on (0001) sapphire studied by transmission electron microscopy'. Together they form a unique fingerprint.

    Cite this