Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching

S. Samukawa, Shuichi Noda, Akio Higo, Manabu Yasuda, Kazumi Wada

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.

Original languageEnglish
Title of host publicationNanophotonics and Micro/Nano Optics III
EditorsKazumi Wada, Zhiping Zhou
ISBN (Electronic)9781510604735
Publication statusPublished - 2016
EventNanophotonics and Micro/Nano Optics III - Beijing, China
Duration: 2016 Oct 122016 Oct 14

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


OtherNanophotonics and Micro/Nano Optics III


  • Ferritin bio-template
  • GaAs
  • Ge
  • Nanodisks and nano-wires
  • Neutral beam etching
  • Si

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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