@inproceedings{849c1d1ab764439aabc2acdbe35c0ae8,
title = "Defect-free fabrication of nano-disk and nano-wire by fusion of bio-template and neutral beam etching",
abstract = "We have developed an innovated fabrication technology of Si, GaAs, and Ge nano-structures, i.e., we called defect-free neutral beam etching. The technology has been successfully applied to prototype the quantum nano-disks and nano-wires with ferritin based bio-templates. SEM observation verifies that the designed structures are prototyped. Photoluminescence measurements demonstrates high optical quality of nano-structures based on the technology.",
keywords = "Ferritin bio-template, GaAs, Ge, Nanodisks and nano-wires, Neutral beam etching, Si",
author = "S. Samukawa and Shuichi Noda and Akio Higo and Manabu Yasuda and Kazumi Wada",
year = "2016",
doi = "10.1117/12.2247702",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Kazumi Wada and Zhiping Zhou",
booktitle = "Nanophotonics and Micro/Nano Optics III",
note = "Nanophotonics and Micro/Nano Optics III ; Conference date: 12-10-2016 Through 14-10-2016",
}