Dc self-bias voltages in radio frequency magnetron discharges

S. Yonemura, K. Nanbu

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The dc self-bias voltage of RF planar magnetron discharges of argon gas was clarified by performing particle-in-cell/Monte Carlo (PIC/MC) simulations. The self-bias increased with increasing magnetic field and became positive. This dependence of self-bias on the magnetic field agrees with the experimental result, the theoretical result, and the numerical result of fluid simulation on magnetically enhanced capacitively coupled plasma with a magnetic field parallel to the electrode surface. The plasma was confined between the magnetic poles for a narrow gap (≤ 30 mm), but spread over a large space for a larger gap.

Original languageEnglish
Pages (from-to)517-521
Number of pages5
JournalThin Solid Films
Volume506-507
DOIs
Publication statusPublished - 2006 May 26

Keywords

  • Dc self-bias voltage
  • Particle-in-cell/Monte Carlo simulation
  • Processing plasma
  • Radio frequency magnetron discharges

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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