Abstract
A 64-Mbit DRAM with WSix/P+poly-Si gate NMOS cell transistors (P+gate DRAM) has been developed to improve the DRAM data retention time of tail-distribution. The data retention time that corresponds to 0.01% failure bit in the cumulative probability of P+gate DRAM is 2.7 times longer than that of conventional N+gate DRAM. The main reason for improving data retention time is that low channel-doping level, which is achieved by P+gate DRAM, reduces the electric field at around 0.04um depth below the surface.
Original language | English |
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Pages (from-to) | 395-398 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting |
Publication status | Published - 2001 Dec 1 |
Event | IEEE International Electron Devices Meeting IEDM 2001 - Washington, DC, United States Duration: 2001 Dec 2 → 2001 Dec 5 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry