TY - JOUR
T1 - Damping Control for Packaged Micro Mechanical Devices
AU - Minami, Kazuyuki
AU - Moriuchi, Terumi
AU - Esashi, Masayoshi
N1 - Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 1997
Y1 - 1997
N2 - Damping control for packaged micro mechanical devices, such as an accelerometer, is desired to achieve wide frequency range by preventing the overdamping and suppressing the resonance. For capacitive detection type devices, which have narrow gap in a sealed cavity, the control of the cavity pressure is required for the damping control. We developed a novel cavity pressure control method using non-evaporable getters (NEC) and inert gas in anodically bonded glass-silicon structure. From the experiments using deflection of thin silicon diaphragm, the cavity pressure could be controlled at 120 and 5900Pa as designed. In application to the accelerometer, vibration behavior of seismic mass was studied experimentally and simulated by using Molecular Gas film Lubrication (MGL) equation. The result indicates that the critical damping under controlled pressure can be well designed to achieve wide frequency range.
AB - Damping control for packaged micro mechanical devices, such as an accelerometer, is desired to achieve wide frequency range by preventing the overdamping and suppressing the resonance. For capacitive detection type devices, which have narrow gap in a sealed cavity, the control of the cavity pressure is required for the damping control. We developed a novel cavity pressure control method using non-evaporable getters (NEC) and inert gas in anodically bonded glass-silicon structure. From the experiments using deflection of thin silicon diaphragm, the cavity pressure could be controlled at 120 and 5900Pa as designed. In application to the accelerometer, vibration behavior of seismic mass was studied experimentally and simulated by using Molecular Gas film Lubrication (MGL) equation. The result indicates that the critical damping under controlled pressure can be well designed to achieve wide frequency range.
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U2 - 10.1541/ieejsmas.117.109
DO - 10.1541/ieejsmas.117.109
M3 - Article
AN - SCOPUS:85024468727
VL - 117
SP - 109
EP - 116
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 2
ER -