Fingerprint
Dive into the research topics of 'Damage mechanism in low-dielectric (low- k) films during plasma processes'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Damage mechanism in low-dielectric (low- k) films during plasma processes
Butsurin Jinnai, Toshihisa Nozawa, Seiji Samukawa
Research output: Contribution to journal › Article › peer-review
42
Citations
(Scopus)