Damage free very low electron temperature plasma process for low Flicker noise in p-MOS fabricated on (100) and (110) silicon-oriented wafers

The evaluation of new equipments developed at the Tohoku University and based on a very low electron temperature microwave-excited high-density plasma is presented through the study of the Flicker noise. These new equipments which are working with very low electron temperature and presenting very useful features, such as an oxide growth rate regardless of the crystallographic orientation of the silicon, allow us to fabricate gate oxides of very high quality on any kind of surfaces as well as damage-free thin films. The confirmation of these features and of the quality of this technology has been confirmed from the noise measurements carried out on Si(100) and Si(110) pMOS transistors by the extraction of several parameters such as the trap density. Moreover, the 1/f noise study in the Si(110) transistors has been done for the first time and revealed that the noise sources are the mobility fluctuations caused by the fluctuation of the scattering mechanism in the lattice in saturation and the fluctuation of the insulator charge inducing correlated flat band voltage and mobility fluctuations in the linear regime. Regarding the Si(100) transistors, the Flicker noise is explained in term of flat band voltage fluctuations in the linear regime and of mobility fluctuations in saturation.