Cylindrical Mirror Grinding with Resinoid-Bonded Extremely Fine Grit Diamond Wheels

The goal of this paper is a mirror grinding of ceramic cylinder with an extremely fine grit diamond wheel. An ultra precision cylindrical grinding machine and a truing and dressing device for it are designed and built. For a mirror grinding, a very fine infeed motion and a low vibration are needed to avoid sinking diamond grits into a bond material with an unexpectedly large force on individual grits. Therefore, the grinding machine has a hydrostatic wheel spindle and a hybrid infeed mechanism. The latter one consists of a ball screw and a DC servomotor for a rough feed, and four piezoelectric actuators for a fine feed. The piezoelectric actuators are mounted in the ball screw nut. Vibration amplitude of the wheel head was less than 0.1 μm and the minimum depth of cut was 0.01 μm/step. After truing and balancing a resinoidbonded diamond wheel (SD5000B) on the machine precisely, a mirror grinding of a partially stabilized zirconia cylinder was carried out. A peak-to-valley height of the ground surface was 53 nm and a maximum chipping length on the edge was 0.5 μm or below.