Crystallographic influence on nanomechanics of (100)-oriented silicon resonators

Dong F. Wang; Takahito Ono; Masayoshi Esashi

doi:10.1063/1.1616652

Crystallographic influence on nanomechanics of (100)-oriented silicon resonators

Dong F. Wang, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.

Original language	English
Pages (from-to)	3189-3191
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	15
DOIs	https://doi.org/10.1063/1.1616652
Publication status	Published - 2003 Oct 13

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Crystallographic influence on nanomechanics of (100)-oriented silicon resonators",

abstract = "The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.",

author = "Wang, {Dong F.} and Takahito Ono and Masayoshi Esashi",

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Y1 - 2003/10/13

N2 - The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.

AB - The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.

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JO - Applied Physics Letters

JF - Applied Physics Letters

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Crystallographic influence on nanomechanics of (100)-oriented silicon resonators

Abstract

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