Crystallographic influence on nanomechanics of (100)-oriented silicon resonators

Dong F. Wang, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.

Original languageEnglish
Pages (from-to)3189-3191
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number15
DOIs
Publication statusPublished - 2003 Oct 13

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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