Abstract
The influence of crystallographic orientation on the nanomechanical properties of (100)-oriented single-crystal silicon resonators was discussed. The influence was studied by examining the effects of surface treatments. The measured Q-factor varied periodically with crystallographic orientation and had higher values in the «110» direction.
Original language | English |
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Pages (from-to) | 3189-3191 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 15 |
DOIs | |
Publication status | Published - 2003 Oct 13 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)