Crystallite distribution analysis based on hydrogen content in thin-film nanocrystalline silicon solar cells by atom probe tomography

Yasuo Shimizu, Hitoshi Sai, Takuya Matsui, Kenji Taki, Taiki Hashiguchi, Hirotaka Katayama, Mitsuhiro Matsumoto, Akira Terakawa, Koji Inoue, Yasuyoshi Nagai

Research output: Contribution to journalArticlepeer-review

Abstract

The three-dimensional (3D) distribution of nanosized silicon (Si) crystallites within a hydrogenated nanocrystalline Si (nc-Si:H) material is examined by laser-assisted atom probe tomography (APT). The amorphous and crystalline phases in nc-Si:H are distinguished by obtaining the 3D density distribution of H atoms, because the former contains a high H density. The H content in the amorphous phase is estimated to be approximately 15 at% by APT, which is consistent with that obtained by infrared spectroscopy. Thus, the 3D analysis of H distribution via APT is a powerful method to visualize the real shape of nanosized crystallites within nc-Si:H materials.

Original languageEnglish
Article number016501
JournalApplied Physics Express
Volume14
Issue number1
DOIs
Publication statusPublished - 2020 Dec 16

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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