Crystallinity-induced degradation of the lifetime of advanced interconnections

Takeru Kato, Ken Suzuki, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The electromigration (EM) resistance of interconnections manufactured by electroplating was investigated from the viewpoint of temperature and diffusion paths in the polycrystalline materials. The crystallinity of the interconnections was evaluated by image quality (IQ) value obtained from electron back-scatter diffraction analysis. The degradation process under the EM test was observed by using the IQ value. The degradation of the interconnections was dominated by the diffusion of component atoms along random grain boundaries with low crystallinity. It was also found that the electrical resistance of the interconnections varied drastically depending on the crystallinity of the material, and thus, the maximum temperature in the interconnections caused by Joule heating during the EM loading also varied drastically because of the change of the resistance. Since the diffusion constant of the component atoms is accelerated by not only the current density but also temperature, the lifetime of the interconnections under the EM loading is a strong function of the crystallinity of the interconnections. It is necessary, therefore, to evaluate and control the crystallinity of the interconnections quantitatively using IQ value to assure their long-term reliability.

Original languageEnglish
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791850640
DOIs
Publication statusPublished - 2016 Jan 1
EventASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016 - Phoenix, United States
Duration: 2016 Nov 112016 Nov 17

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume10

Other

OtherASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
CountryUnited States
CityPhoenix
Period16/11/1116/11/17

ASJC Scopus subject areas

  • Mechanical Engineering

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