Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

Zhan Jie Wang, Yuki Aoki, Li Jun Yan, Hiroyuki Kokawa, Ryutaro Maeda

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

Lead zirconate titanate (Pb(ZrxTi1-x)O3: PZT) thin films were fabricated on Pt/Ti/SiO2/Si(1 0 0) substrates by a hybrid process comprising the sol-gel method and pulsed-laser deposition, using various targets of Pb(ZrxTi1-x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.

Original languageEnglish
Pages (from-to)92-99
Number of pages8
JournalJournal of Crystal Growth
Volume267
Issue number1-2
DOIs
Publication statusPublished - 2004 Jun 15

Keywords

  • A1. Crystal structure
  • A3. Solid phase epitaxy
  • B1. Perovskites
  • B2. Ferroelectric materials
  • B2. Piezoelectric materials

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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