Crosstalk error analysis of a multi-degree-of-freedom surface encoder for a planar motion stage

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, the analysis of crosstalk error in an optical sensor head for a six degree-of-freedom (DOF) surface encoder is carried out. Since the crosstalk errors among the outputs from the sensor degrade the measurement uncertainty of the surface encoder, a further detailed analysis is required. In this paper, an intensive investigation on the crosstalk errors is carried out throughout some experiments.

Original languageEnglish
Title of host publicationProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
EditorsTeen-Hang Meen
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages36-39
Number of pages4
ISBN (Electronic)9781538656099
DOIs
Publication statusPublished - 2019 Jan 16
Event2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018 - Yunlin, Taiwan, Province of China
Duration: 2018 Nov 162018 Nov 18

Publication series

NameProceedings of the 2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018

Conference

Conference2018 IEEE International Conference on Advanced Manufacturing, ICAM 2018
CountryTaiwan, Province of China
CityYunlin
Period18/11/1618/11/18

Keywords

  • Diffraction grating and crosstalk error
  • Multi degree-of-freedom measurement
  • Surface encoder

ASJC Scopus subject areas

  • Biomedical Engineering
  • Mechanics of Materials
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Education
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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