Crossover between surface science and precision engineering

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)429-432
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume80
Issue number5
DOIs
Publication statusPublished - 2014 May

Keywords

  • AES
  • CVD
  • Diamond
  • In-situ observation
  • Photon-induced reactions
  • Plasma-enhanced process
  • RHEED
  • Real-time monitoring
  • Silicon
  • Synchrotron radiation
  • Thin film growth
  • UPS
  • XPS

ASJC Scopus subject areas

  • Mechanical Engineering

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