@article{2a5c1dc3d097406cbba0b76148524d2b,
title = "Crossover between surface science and precision engineering",
keywords = "AES, CVD, Diamond, In-situ observation, Photon-induced reactions, Plasma-enhanced process, RHEED, Real-time monitoring, Silicon, Synchrotron radiation, Thin film growth, UPS, XPS",
author = "Yuji Takakuwa and Shuichi Ogawa",
year = "2014",
month = may,
doi = "10.2493/jjspe.80.429",
language = "English",
volume = "80",
pages = "429--432",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "5",
}