Creation of a degraded layer on the surface of photoresist by radical irradiation

Naoyuki Kofuji, Hideo Miura

Research output: Contribution to journalArticle

4 Citations (Scopus)

Fingerprint Dive into the research topics of 'Creation of a degraded layer on the surface of photoresist by radical irradiation'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science