Cr-N strain-gauge-type precision displacement sensor for measuring positions of micro stage

Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science

Chemical Compounds