Cr-N strain-gauge-type precision displacement sensor for measuring positions of micro stage

Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A strain-gauge-type precision displacement sensor, which is developed for the positioning of a micro-XY stage, is described in this paper. A thin-film strain-gauge element, which is made of Cr-N alloy, is directly fabricated on a ceramic base plate by using photolithography processes to achieve higher sensitivity and better thermal stability for the detection of the stage displacement. In this study, several designs of the thin-film strain gauge including both two-gauge type and four-gauge type are fabricated to investigate sensor performances such as sensitivity, stability and so on. Details of the design, fabrication and evaluation results of the Cr-N strain-gauge-type displacement sensor are described.

Original languageEnglish
Title of host publicationEmerging Technology in Precision Engineering XIV
PublisherTrans Tech Publications Ltd
Pages939-944
Number of pages6
ISBN (Print)9783037855096
DOIs
Publication statusPublished - 2012 Jan 1
Event14th International Conference on Precision Engineering, ICPE 2012 - Hyogo, Japan
Duration: 2012 Nov 82012 Nov 10

Publication series

NameKey Engineering Materials
Volume523-524
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other14th International Conference on Precision Engineering, ICPE 2012
CountryJapan
CityHyogo
Period12/11/812/11/10

Keywords

  • Cr-N alloy
  • Displacement sensor
  • Micro stage
  • Photolithography
  • Precision measurement
  • Strain gauge

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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