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Covalent nature in la-silicate gate dielectrics for oxygen vacancy removal
Takamasa Kawanago, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Akira Nishiyama, Nobuyuki Sugii, Kenji Natori, Takeo Hattori, Hiroshi Iwai
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)