Covalent nature in la-silicate gate dielectrics for oxygen vacancy removal

Takamasa Kawanago, Kuniyuki Kakushima, Parhat Ahmet, Kazuo Tsutsui, Akira Nishiyama, Nobuyuki Sugii, Kenji Natori, Takeo Hattori, Hiroshi Iwai

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science