Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao

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1 Citation (Scopus)

Abstract

Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.

Original languageEnglish
Pages (from-to)180-186
Number of pages7
JournalMaterials Research Letters
Volume8
Issue number5
DOIs
Publication statusPublished - 2020 May 3

Keywords

  • MEMS
  • Single-crystal diamond
  • galfenol (FeGa)
  • magnetostrictive effect

ASJC Scopus subject areas

  • Materials Science(all)

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    Zhang, Z., Wu, Y., Sang, L., Wu, H., Huang, J., Wang, L., Takahashi, Y., Li, R., Koizumi, S., Toda, M., Akita, I. M., Koide, Y., & Liao, M. (2020). Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures. Materials Research Letters, 8(5), 180-186. https://doi.org/10.1080/21663831.2020.1734680