Abstract
First, the method to calculate Coulomb collisions in materials processing plasmas is presented. Next, by use of the method, the effect of electron-electron (e--e-) collisions on the relaxation of electron energy distribution function (EEDF) is examined for a spatially uniform argon plasma. The EEDF is shown not to tend to the Maxwellian distribution without e--e- collisions because once high-energy electrons lose energy by inelastic collisions, they have no chance to recover their energy without e--e- collisions. When e--e- collisions are taken into consideration, the relaxation time of the EEDF at gas pressure 10 mTorr is 40, 20, and 10 μs for electron densities 10l6, 1017, and 1018 m- 3 respectively. Lastly, the effect of e --e- collisions on the EEDF is examined for a capacitively coupled plasma at gas pressure 25 mTorr. It is found that the effect is negligible even for the electron density 1017 m - 3.
Original language | English |
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Pages (from-to) | 720-723 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 506-507 |
DOIs | |
Publication status | Published - 2006 May 26 |
Keywords
- Coulomb collision
- EEDF
- Particle modeling
- Processing plasma
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry