Abstract
Nanoscale channel formation and characterization in ultrathin graphite film are performed. Two narrow channels with a submicron square connected in series are patterned by electron-beam lithography followed by oxygen plasma etching. The patterned film showed Coulomb blockade oscillations in the source-drain current upon a gate voltage change at 4.2 K. The Coulomb blockade effect occurred due to the electric potential modulation in the narrow graphite channels.
Original language | English |
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Pages (from-to) | 697-699 |
Number of pages | 3 |
Journal | Japanese journal of applied physics |
Volume | 47 |
Issue number | 1 PART 2 |
DOIs | |
Publication status | Published - 2008 Jan 22 |
Externally published | Yes |
Keywords
- Coulomb blockade
- Microfabrication
- Ultrathin graphite
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)