Corrosion behavior of stainless steel and aluminum in a downstream environment of CF4/O2 microwave plasma

Nobuyoshi Hara, Shingo Mukuhara, Katsuhisa Ohtomo, Yasufumi Shimizu, Katsuhisa Sugimoto

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds