Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Eungsun Byon; Myungsook Son; Nobuyoshi Hara; Katsuhisa Sugimoto

doi:10.1016/S0040-6090(03)01056-3

Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Eungsun Byon, Myungsook Son, Nobuyoshi Hara, Katsuhisa Sugimoto

Leadership

Research output: Contribution to journal › Conference article › peer-review

7 Citations (Scopus)

Abstract

The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150-280 nm. In order to understand effect of pH of solutions, BC_2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B_1.0C_2.4N_1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B_1.0C_(3.2-4.4)N _1.2 films.

Original language	English
Pages (from-to)	197-200
Number of pages	4
Journal	Thin Solid Films
Volume	447-448
DOIs	https://doi.org/10.1016/S0040-6090(03)01056-3
Publication status	Published - 2004 Jan 30
Event	Proceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States Duration: 2002 Apr 28 → 2002 May 2

Keywords

Boron carbon nitride films
Composition effect
Corrosion behaviour
Magnetron sputtering
PH of the solution

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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title = "Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering",

abstract = "The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150-280 nm. In order to understand effect of pH of solutions, BC2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B1.0C2.4N1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B1.0C(3.2-4.4)N 1.2 films.",

keywords = "Boron carbon nitride films, Composition effect, Corrosion behaviour, Magnetron sputtering, PH of the solution",

author = "Eungsun Byon and Myungsook Son and Nobuyoshi Hara and Katsuhisa Sugimoto",

note = "Funding Information: This work was supported by the KIMM program of the Ministry of Science and Technology of Korea under Contract No. PNK 0532, 0662 and 0752. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; Proceedings of the 30th International Conference on Metallurgie ; Conference date: 28-04-2002 Through 02-05-2002",

year = "2004",

month = jan,

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doi = "10.1016/S0040-6090(03)01056-3",

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T1 - Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

AU - Byon, Eungsun

AU - Son, Myungsook

AU - Hara, Nobuyoshi

AU - Sugimoto, Katsuhisa

N1 - Funding Information: This work was supported by the KIMM program of the Ministry of Science and Technology of Korea under Contract No. PNK 0532, 0662 and 0752. Copyright: Copyright 2008 Elsevier B.V., All rights reserved.

PY - 2004/1/30

Y1 - 2004/1/30

N2 - The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150-280 nm. In order to understand effect of pH of solutions, BC2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B1.0C2.4N1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B1.0C(3.2-4.4)N 1.2 films.

AB - The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150-280 nm. In order to understand effect of pH of solutions, BC2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B1.0C2.4N1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B1.0C(3.2-4.4)N 1.2 films.

KW - Boron carbon nitride films

KW - Composition effect

KW - Corrosion behaviour

KW - Magnetron sputtering

KW - PH of the solution

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JO - Thin Solid Films

JF - Thin Solid Films

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T2 - Proceedings of the 30th International Conference on Metallurgie

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