Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Eungsun Byon, Myungsook Son, Nobuyoshi Hara, Katsuhisa Sugimoto

Research output: Contribution to journalConference articlepeer-review

8 Citations (Scopus)


The corrosion behavior of BCN thin films in aqueous solution was investigated. BCN films with different composition were deposited on a platinum plate by magnetron sputtering in the thickness range of 150-280 nm. In order to understand effect of pH of solutions, BC2.4N samples were immersed in 1 M HCl, 1 M NaCl and 1 M NaOH solution at 298 K, respectively. BCN samples with different carbon content were immersed in 1 M NaOH solutions to investigate the effect of chemical composition on corrosion resistance. The corrosion rate of the samples were measured by ellipsometry. The corrosion rates of B1.0C2.4N1.0 films in the immersion test were NaOH>NaCl>HCl in sequence. With increasing carbon content in BCN films, the corrosion resistance of BCN films is enhanced. The lowest corrosion rate was obtained for B1.0C(3.2-4.4)N 1.2 films.

Original languageEnglish
Pages (from-to)197-200
Number of pages4
JournalThin Solid Films
Publication statusPublished - 2004 Jan 30
EventProceedings of the 30th International Conference on Metallurgie - San Diego, CA, United States
Duration: 2002 Apr 282002 May 2


  • Boron carbon nitride films
  • Composition effect
  • Corrosion behaviour
  • Magnetron sputtering
  • PH of the solution

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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