Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique

Takahiro Sasaki, Hironori Tohmyoh

Research output: Contribution to journalArticlepeer-review

Abstract

Ag film lines have attracted considerable attention recently as a substitute for the next-generation of transparent conducting electrodes, and as such, ensuring the reliability of Ag film, i.e., their resistance to corrosion, is an important issue. Corrosion of these metallic film changes their electrical properties, leading to the malfunction of electrical devices. In this study, the authors examined the corrosion of 400 nm thick Ag film lines kept in atmospheric conditions for more than three years. The rate of corrosion over this period was determined by examining the changes in their electrical resistance, which was obtained from the potential drop measurements. It was confirmed that the rate of corrosion remained approximately constant for about one and a half years and then started to decreased monotonically with time. These results can be used to determine the reliability of Ag film lines.

Original languageEnglish
Article number014011
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume38
Issue number1
DOIs
Publication statusPublished - 2020 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique'. Together they form a unique fingerprint.

Cite this