TY - JOUR
T1 - Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique
AU - Sasaki, Takahiro
AU - Tohmyoh, Hironori
N1 - Funding Information:
This work was supported by JSPS KAKENHI under Grant No. 18H01331. Part of this work was performed at the Micro/ Nano-Machining Research and Education Center of Tohoku University.
Publisher Copyright:
© 2019 Author(s).
PY - 2020/1/1
Y1 - 2020/1/1
N2 - Ag film lines have attracted considerable attention recently as a substitute for the next-generation of transparent conducting electrodes, and as such, ensuring the reliability of Ag film, i.e., their resistance to corrosion, is an important issue. Corrosion of these metallic film changes their electrical properties, leading to the malfunction of electrical devices. In this study, the authors examined the corrosion of 400 nm thick Ag film lines kept in atmospheric conditions for more than three years. The rate of corrosion over this period was determined by examining the changes in their electrical resistance, which was obtained from the potential drop measurements. It was confirmed that the rate of corrosion remained approximately constant for about one and a half years and then started to decreased monotonically with time. These results can be used to determine the reliability of Ag film lines.
AB - Ag film lines have attracted considerable attention recently as a substitute for the next-generation of transparent conducting electrodes, and as such, ensuring the reliability of Ag film, i.e., their resistance to corrosion, is an important issue. Corrosion of these metallic film changes their electrical properties, leading to the malfunction of electrical devices. In this study, the authors examined the corrosion of 400 nm thick Ag film lines kept in atmospheric conditions for more than three years. The rate of corrosion over this period was determined by examining the changes in their electrical resistance, which was obtained from the potential drop measurements. It was confirmed that the rate of corrosion remained approximately constant for about one and a half years and then started to decreased monotonically with time. These results can be used to determine the reliability of Ag film lines.
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U2 - 10.1116/1.5132765
DO - 10.1116/1.5132765
M3 - Article
AN - SCOPUS:85077511521
VL - 38
JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
SN - 2166-2746
IS - 1
M1 - 014011
ER -