Abstract
Ag film lines have attracted considerable attention recently as a substitute for the next-generation of transparent conducting electrodes, and as such, ensuring the reliability of Ag film, i.e., their resistance to corrosion, is an important issue. Corrosion of these metallic film changes their electrical properties, leading to the malfunction of electrical devices. In this study, the authors examined the corrosion of 400 nm thick Ag film lines kept in atmospheric conditions for more than three years. The rate of corrosion over this period was determined by examining the changes in their electrical resistance, which was obtained from the potential drop measurements. It was confirmed that the rate of corrosion remained approximately constant for about one and a half years and then started to decreased monotonically with time. These results can be used to determine the reliability of Ag film lines.
| Original language | English |
|---|---|
| Article number | 014011 |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 38 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2020 Jan 1 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry