Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

    Research output: Contribution to journalArticle

    17 Citations (Scopus)

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    Engineering & Materials Science

    Physics & Astronomy