Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

    Research output: Contribution to journalArticle

    17 Citations (Scopus)

    Abstract

    We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

    Original languageEnglish
    Article number5995226
    Pages (from-to)1684-1687
    Number of pages4
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Volume58
    Issue number8
    DOIs
    Publication statusPublished - 2011 Aug 1

    ASJC Scopus subject areas

    • Instrumentation
    • Acoustics and Ultrasonics
    • Electrical and Electronic Engineering

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