Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda; Motoaki Hara; Michio Miura; Takashi Matsuda; Masanori Ueda; Yoshio Satoh; Ken Ya Hashimoto

doi:10.1109/TUFFC.2011.1996

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

Original language	English
Article number	5995226
Pages (from-to)	1684-1687
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	58
Issue number	8
DOIs	https://doi.org/10.1109/TUFFC.2011.1996
Publication status	Published - 2011 Aug 1

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2011.1996

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Matsuda, S., Hara, M., Miura, M., Matsuda, T., Ueda, M., Satoh, Y., & Hashimoto, K. Y. (2011). Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 58(8), 1684-1687. [5995226]. https://doi.org/10.1109/TUFFC.2011.1996

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. / Matsuda, Satoru; Hara, Motoaki; Miura, Michio; Matsuda, Takashi; Ueda, Masanori; Satoh, Yoshio; Hashimoto, Ken Ya.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 58, No. 8, 5995226, 01.08.2011, p. 1684-1687.

Research output: Contribution to journal › Article › peer-review

Matsuda, S, Hara, M, Miura, M, Matsuda, T, Ueda, M, Satoh, Y & Hashimoto, KY 2011, 'Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices', IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 58, no. 8, 5995226, pp. 1684-1687. https://doi.org/10.1109/TUFFC.2011.1996

Matsuda, Satoru ; Hara, Motoaki ; Miura, Michio ; Matsuda, Takashi ; Ueda, Masanori ; Satoh, Yoshio ; Hashimoto, Ken Ya. / Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 2011 ; Vol. 58, No. 8. pp. 1684-1687.

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