Abstract
We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.
| Original language | English |
|---|---|
| Article number | 5995226 |
| Pages (from-to) | 1684-1687 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Volume | 58 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - 2011 Aug 1 |
ASJC Scopus subject areas
- Instrumentation
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering
Fingerprint Dive into the research topics of 'Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices'. Together they form a unique fingerprint.
Cite this
Matsuda, S., Hara, M., Miura, M., Matsuda, T., Ueda, M., Satoh, Y., & Hashimoto, K. Y. (2011). Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 58(8), 1684-1687. [5995226]. https://doi.org/10.1109/TUFFC.2011.1996