Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda; Motoaki Hara; Michio Miura; Takashi Matsuda; Masanori Ueda; Yoshio Satoh; Ken Ya Hashimoto

doi:10.1109/TUFFC.2011.1996

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken Ya Hashimoto

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

Original language	English
Article number	5995226
Pages (from-to)	1684-1687
Number of pages	4
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	58
Issue number	8
DOIs	https://doi.org/10.1109/TUFFC.2011.1996
Publication status	Published - 2011 Aug

ASJC Scopus subject areas

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2011.1996

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Matsuda, S., Hara, M., Miura, M., Matsuda, T., Ueda, M., Satoh, Y., & Hashimoto, K. Y. (2011). Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 58(8), 1684-1687. [5995226]. https://doi.org/10.1109/TUFFC.2011.1996

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices. / Matsuda, Satoru; Hara, Motoaki; Miura, Michio et al.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 58, No. 8, 5995226, 08.2011, p. 1684-1687.

Research output: Contribution to journal › Article › peer-review

Matsuda, S, Hara, M, Miura, M, Matsuda, T, Ueda, M, Satoh, Y & Hashimoto, KY 2011, 'Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices', IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 58, no. 8, 5995226, pp. 1684-1687. https://doi.org/10.1109/TUFFC.2011.1996

@article{70f7fec161ba4ef490fa9a1f41e4b623,

title = "Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices",

abstract = "We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.",

author = "Satoru Matsuda and Motoaki Hara and Michio Miura and Takashi Matsuda and Masanori Ueda and Yoshio Satoh and Hashimoto, {Ken Ya}",

year = "2011",

month = aug,

doi = "10.1109/TUFFC.2011.1996",

language = "English",

volume = "58",

pages = "1684--1687",

journal = "Transactions of the IRE Professional Group on Ultrasonic Engineering",

issn = "0885-3010",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "8",

}

TY - JOUR

T1 - Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

AU - Matsuda, Satoru

AU - Hara, Motoaki

AU - Miura, Michio

AU - Matsuda, Takashi

AU - Ueda, Masanori

AU - Satoh, Yoshio

AU - Hashimoto, Ken Ya

PY - 2011/8

Y1 - 2011/8

N2 - We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

AB - We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO2 for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

UR - http://www.scopus.com/inward/record.url?scp=80052039730&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80052039730&partnerID=8YFLogxK

U2 - 10.1109/TUFFC.2011.1996

DO - 10.1109/TUFFC.2011.1996

M3 - Article

C2 - 21859588

AN - SCOPUS:80052039730

VL - 58

SP - 1684

EP - 1687

JO - Transactions of the IRE Professional Group on Ultrasonic Engineering

JF - Transactions of the IRE Professional Group on Ultrasonic Engineering

SN - 0885-3010

IS - 8

M1 - 5995226

ER -

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices

Abstract

ASJC Scopus subject areas

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