The correlation between the laser absorption and the conversion efficiency (CE) for 13.5 nm extreme ultraviolet (EUV) light in a laser-produced tin plasma was investigated. The absorption rate α and the CE were measured simultaneously for a laser-pre-formed low-density tin target as a function of the time delay between the pre-pulse and the main laser pulse. A clear and positive correlation between α and CE was found with increasing delay time; however, the CE decreases rapidly at longer delay times. This result is partly attributed to a reduction in the absorption rate, but is mainly attributed to the self-absorption of EUV light in excessively long-scale plasmas.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)