Copper damascene using low dielectric constant fluorinated amorphous carbon interlayer

Y. Matsubara, K. Endo, M. Iguchi, N. Ito, K. Aoyama, T. Tatsumi, T. Horiuchi

Research output: Contribution to journalConference article

9 Citations (Scopus)

Abstract

We have developed a new interconnect technique using a low-k (εr=2.5) organic interlayer (fluorinated amorphous carbon: a-C:F) and a low-resistivity metal line (copper). The new technique attains a duction in both the capacitance of the interlayer and the resistance of the metal line. We found that a-C:F on Cu reduces reflection to 10% for Kr-F line lithography. However, a-C:F cannot act as a protection layer for oxidation even at 200°C in atmospheric ambient annealing. Cu diffusion into a-C:F is about 100 nm at the annealing temperature of 450°C. The resistivity of the Cu line is 2.3-2.4 μΩ · cm for the 0.5-μm line width. Although the leakage current of the a-C:F ILD is one order higher than of the SiO2 ILD, electrical isolation is acceptable at < 20 V when annealing is carried out at 350°C in a vacuum.

Original languageEnglish
Pages (from-to)291-296
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume511
DOIs
Publication statusPublished - 1998 Jan 1
Externally publishedYes
EventProceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA
Duration: 1998 Apr 131998 Apr 17

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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