Controlling the electrical properties of ZnO films by forming zinc and oxide bridges by a plasma and electron-assisted process

Norihiro Shimoi, Takamitsu Harada, Yasumitsu Tanaka, Shun Ichiro Tanaka

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A new method to produce electrically steady ZnO films without any heating process has been developed by using plasma and electron beams to facilitate bonding between the metallic component and the oxygen on coated ZnO films. Both plasma atmosphere and electron beams can function as sources of nonequilibrium bonding energy, forming bridges between the zinc present in the zinc complex and the oxygen in the ZnO particles to construct a zinc-oxide thin film. Our results confirm that it is possible to achieve low conductive characteristics by controlling the acceleration voltage of electrons used to irradiate the ZnO coating. The electrically steady films fabricated have various potential applications, being particularly wellsuited to electrical devices on a plastic medium.

Original languageEnglish
Article number022167
JournalAIP Advances
Volume2
Issue number2
DOIs
Publication statusPublished - 2012

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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