Controlled strong excitation of silicon as a step towards processing materials at sub-nanometer precision

Thanh Hung Dinh, Nikita Medvedev, Masahiko Ishino, Toshiyuki Kitamura, Noboru Hasegawa, Tomohito Otobe, Takeshi Higashiguchi, Kazuyuki Sakaue, Masakazu Washio, Tadashi Hatano, Akira Kon, Yuya Kubota, Yuichi Inubushi, Shigeki Owada, Tatsunori Shibuya, Beata Ziaja, Masaharu Nishikino

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    14 Citations (Scopus)

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    Physics & Astronomy