@inproceedings{9b7eb6373df44a0f98414aa8c460f83b,
title = "Controllability of dopant ion number in single ion implantation",
author = "Takahiro Shinada and Takashi Matsukawa and Lwao Ohdomari",
year = "1998",
doi = "10.1109/IMNC.1998.730067",
language = "English",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "253--254",
editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
note = "1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
}