Control performance of interactions between reactive plasma jet and substrate

Hideya Nishiyama, Takehiko Sato, Shota Niikura, Genta Chiba, Hidemasa Takana

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.

Original languageEnglish
Pages (from-to)8085-8089
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number10 B
DOIs
Publication statusPublished - 2006 Oct 21

Keywords

  • Control
  • Magnetic field
  • Nitriding
  • Operating pressure
  • Plasma jet
  • Substrate
  • Unstable behavior

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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