A wavelength-selective variable-reflection filter is proposed, in which a guided resonance in a photonic crystal (PC) slab is controlled by microelectronic mechanical actuators. A narrow wavelength response is generated by the guided resonance of PC slab, and the variable optical response at the wavelength is caused by evanescent-wave coupling to a substrate. The coupling is controlled by microelectromechanical actuators. The proposed filter has been fabricated by silicon micromachining and the mechanism has been confirmed.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)