Control of guided resonance in a photonic crystal slab using microelectromechanical actuators

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Abstract

A wavelength-selective variable-reflection filter is proposed, in which a guided resonance in a photonic crystal (PC) slab is controlled by microelectronic mechanical actuators. A narrow wavelength response is generated by the guided resonance of PC slab, and the variable optical response at the wavelength is caused by evanescent-wave coupling to a substrate. The coupling is controlled by microelectromechanical actuators. The proposed filter has been fabricated by silicon micromachining and the mechanism has been confirmed.

Original languageEnglish
Article number031911
JournalApplied Physics Letters
Volume90
Issue number3
DOIs
Publication statusPublished - 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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