Control of distributed electrostatic microstructures

Motoharu Yamaguchi, Shuji Kawamura, Kazuyuki Minami, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


A control method of distributed electrostatic actuator has been studied. The actuator consists of many driving units. Each driving unit has wave-like electrodes, which are insulated and pulled to each ether by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure and the external force. The macro model of the actuator was fabricated to verify its motion. In this actuator the apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving. Two types of actuates- were studied. One is the common-electrode type in which both sensing and driving are performed by the same electrode. The other is the separated-electrode type in which driving electrodes are separated from sensor electrodes, it was confirmed that the apparent compliance can be changed by the feedback gain.

Original languageEnglish
Pages (from-to)90-95
Number of pages6
JournalJournal of Micromechanics and Microengineering
Issue number2
Publication statusPublished - 1993 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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