Control of aperture size of optical probes for scanning near-field optical microscopy using focused ion beam technology

Masaru Muranishi, Kazutaka Sato, Sumio Hosaka, Atsushi Kikukawa, Toshimichi Shintani, Kenchi Ito

Research output: Contribution to journalArticlepeer-review

37 Citations (Scopus)

Abstract

We propose a fabrication technique for apertures of optical probes for scanning near-field optical microscopy (SNOM) using a focused ion beam (FIB) process. We tried two FIB processes, FIB drilling and FIB slicing. The FIB slicing technique is very useful for fabrication of nm-sized SNOM apertures of less than 50 nm. The problem with the FIB drilling process is that it is difficult to identify the apex of the tip and to control the beam onto the apex. The FIB slicing technique can easily fabricate an aperture at an apex and control aperture size by cut-off-depth. It is easy for a sharp tip to obtain accurate size of aperture. It can be considered to obtain accurate size of aperture with fabricated error of 35 nm in a sharp tip with cone angle of 30 deg.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume36
Issue number7 B
Publication statusPublished - 1997 Jan 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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