TY - JOUR
T1 - Continuous wave infrared laser deposition of organic thin films
AU - Yaginuma, Seiichiro
AU - Yamaguchi, Jun
AU - Haemori, Masamitsu
AU - Itaka, Kenji
AU - Matsumoto, Yuji
AU - Kondo, Michio
AU - Koinuma, Hideomi
PY - 2007/4/1
Y1 - 2007/4/1
N2 - We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology.
AB - We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology.
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U2 - 10.1088/1742-6596/59/1/112
DO - 10.1088/1742-6596/59/1/112
M3 - Article
AN - SCOPUS:34547258047
VL - 59
SP - 520
EP - 525
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 112
ER -