Continuous wave infrared laser deposition of organic thin films

Seiichiro Yaginuma, Jun Yamaguchi, Masamitsu Haemori, Kenji Itaka, Yuji Matsumoto, Michio Kondo, Hideomi Koinuma

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology.

Original languageEnglish
Article number112
Pages (from-to)520-525
Number of pages6
JournalJournal of Physics: Conference Series
Volume59
Issue number1
DOIs
Publication statusPublished - 2007 Apr 1
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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