Continuous membrane deformable mirror for adaptive optics using bimorph spring

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4 × 4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages598-601
Number of pages4
DOIs
Publication statusPublished - 2011 Sep 1
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 2011 Jun 52011 Jun 9

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period11/6/511/6/9

Keywords

  • Deformable mirror
  • adaptive optics

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Continuous membrane deformable mirror for adaptive optics using bimorph spring'. Together they form a unique fingerprint.

Cite this