Constructions of Aluminum-alloy Ultrahigh Vacuum Chambers

Maki Suemitsu

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1541-1544
Number of pages4
JournalJournal of the Japan Society for Precision Engineering
Volume57
Issue number9
DOIs
Publication statusPublished - 1991 Jan 1

Keywords

  • aluminum alloy
  • outgassing rate
  • surface roughness
  • surface treatment
  • ultra high vacuum chamber

ASJC Scopus subject areas

  • Mechanical Engineering

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