Construction of a measurement and control system for a sawyer motor-driven planar motion stage

M. Tano, I Ko, S. Y. Dian, S. Kiyono, Y. Tomita, K. Makino, H. Motita

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

This paper describes a precision positioning system combined with a Sawyer motor-driven stage and a surface encoder. The stage consists of a platen and forcers (linear pulse motors). The platen is a passive steel plate with teeth over the surface. Each of the forcers, which is levitated on the platen as stage moving element by air-bearing, is composed of a permanent magnet and two driving coils to generate X-directional and Y-directional thrust forces against the platen for driving the stage. A surface encoder is constructed for measurement and control of the stage movement. A sine-grid is mounted on the platen and a sensor-unit is mounted on the stage moving element. There are three optical sensors in the sensor unit for measurement of the X-and Y-positions at three separate points. The θ z displacement of the stage can be calculated from the sensor outputs. A feedback control system is developed for controlling the movement of the stage. Measurement and feedback control experiments are carried out to verify the feasibility of the precision positioning system.

Original languageEnglish
Pages (from-to)182-189
Number of pages8
JournalNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume4
Issue number3
Publication statusPublished - 2006 Sep 1

Keywords

  • Control
  • Measurement
  • Positioning
  • Sawyer motor
  • Sensor
  • Sine grid
  • Surface encoder

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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