Construction of 3-D micro structure by multi-face FAB, co-focus rotational robot and various mechanical tools

Y. Hatamura, M. Nakao, T. Sato, K. Koyano, K. Ichiki, H. Sangu, M. Hatakeyama, T. Kobata, K. Nagai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)


In order to manufacture a 3-D micro structure, the following three mechanical methods are newly designed: (1) Multi-face FAB (Fast Atom Beam): The beam, which passed through a hole of a non-contact mask, can pattern-etch on multiple faces of a workpiece by using the intermittent rotation of the workpiece. Because FAB showers straight, the pattern-etching can be performed sharply even on an undulated workpiece where a lithographic contact mask can not draw any pattern. (2) Co-focus rotational robot: The robot's hand has 4 rotational and 3 translational degrees of freedom. Because the rotation axes cross within the microscopic visual area, an operator can execute any micro 3-D task with the rotation under an all-time observation. (3) Mechanical tools: As an end-effector of micro manufacturing machines, the micro mechanical tools are inevitable. In this paper, a vibrating cutting/scraping tool and an air sucking handling tool are developed. In order to confirm the validity of the above concept and the proposed methods, a micro 'Gojunoto (An old Japanese temple tower, 280 × 100 × 100 μm)' was constructed as an example of the 3-D micro structure. Through this construction, it is clarified that the above methods can successfully realize the 3-D micro structure.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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