Abstract
In order to manufacture a 3-D micro structure, the following three mechanical methods are newly designed: (1) Multi-face FAB (Fast Atom Beam): The beam, which passed through a hole of a non-contact mask, can pattern-etch on multiple faces of a workpiece by using the intermittent rotation of the workpiece. Because FAB showers straight, the pattern-etching can be performed sharply even on an undulated workpiece where a lithographic contact mask can not draw any pattern. (2) Co-focus rotational robot: The robot's hand has 4 rotational and 3 translational degrees of freedom. Because the rotation axes cross within the microscopic visual area, an operator can execute any micro 3-D task with the rotation under an all-time observation. (3) Mechanical tools: As an end-effector of micro manufacturing machines, the micro mechanical tools are inevitable. In this paper, a vibrating cutting/scraping tool and an air sucking handling tool are developed. In order to confirm the validity of the above concept and the proposed methods, a micro 'Gojunoto (An old Japanese temple tower, 280 × 100 × 100 μm)' was constructed as an example of the 3-D micro structure. Through this construction, it is clarified that the above methods can successfully realize the 3-D micro structure.
| Original language | English |
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| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 297-302 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - 1994 Jan 1 |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: 1994 Jan 25 → 1994 Jan 28 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 94/1/25 → 94/1/28 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering