Construction and testing of a nanomachining instrument

Wei Gao, Robert J. Hocken, John A. Patten, John Lovingood, Don A. Lucca

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52 Citations (Scopus)

Abstract

This paper presents a nanomachining instrument that was developed for conducting nanocutting, nanoscratching, and nanoindentation experiments. A piezoelectric tube scanner (PZT) is employed to generate three-dimensional machining motions. The sample is moved by the PZT, and the tool is kept stationary during machining. The machining forces are measured by force sensors with a resolution of sub-milliNewtons. The instrument is compact and can be used inside optical microscopes and scanning electron microscopes. In this paper, depth-sensing indentation experiments were performed to test the basic performance of the instrument. The indentation displacement was measured by a capacitance probe situated inside the PZT tube. An experimental system was constructed to locate and image indentations. The system consists of a high magnification microscope to measure coordinates of the indentation relative to a reference corner point on the sample, and an AFM equipped with an on-axis optical imaging system for locating the indentation. A technique was also employed to establish the tool-sample contact to nanometer accuracy. Indentation experiments were carried out on three kinds of materials with different hardness. Experimental results demonstrated the instrument has the ability of performing depth-sensing indentations. The frame compliance was also evaluated from the indentation results.

Original languageEnglish
Pages (from-to)320-328
Number of pages9
JournalPrecision Engineering
Volume24
Issue number4
DOIs
Publication statusPublished - 2000 Oct

ASJC Scopus subject areas

  • Engineering(all)

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    Gao, W., Hocken, R. J., Patten, J. A., Lovingood, J., & Lucca, D. A. (2000). Construction and testing of a nanomachining instrument. Precision Engineering, 24(4), 320-328. https://doi.org/10.1016/S0141-6359(00)00042-8