Consistency of the surface roughness determined from soft-x-ray reflectance and surface profiles measured using a scanning tunnelling microscope: coherence length of the soft x-rays

Mihiro Yanagihara, Takuya Sasaki, Minaji Furudate, Masaki Yamamoto

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

There exists serious inconsistency between the rms surface roughness determined from the Debye-Waller factor for the soft-x-ray reflectance analysis and that measured with an optical surface profiler. We have measured the surface profile of evaporated films using a scanning tunnelling microscope, and reproduce the profile with the Fourier components whose spatial wavelength is shorter than the coherence length of the incident soft x-rays in the reflectance measurement. The rms surface roughness derived from the high-pass filtered profile agrees well with that determined using the reflectance measurement. This result explains straightforwardly the photon-energy dependence of the surface roughness estimated by the soft-x-ray reflectance method.

Original languageEnglish
Pages (from-to)65-70
Number of pages6
JournalOptical Review
Volume3
Issue number2
DOIs
Publication statusPublished - 1996 Jan 1

Keywords

  • Coherence length
  • Reflectance
  • STM
  • Soft x-ray
  • Surface roughness

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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