Confocal laser displacement sensor using MEMS varifocal mirror

K. Nakazawa, T. Sasaki, H. Furnia, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function for the sensor. The measurement speed and range depend on the mechanism. In this study, we propose to use the micro-machined varifocal mirror for the mechanism of the focal length modulation in the confocal displacement sensor. The electrostatically actuated varifocal mirror made by silicon was used. The working distance of the displacement sensor is designed to be 31 mm. The measurement range at 7 kHz is 310 μm. The linearity in the full scale range is from -1.5% to 0.85%.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2139-2142
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Confocal laser displacement sensor
  • Resonant vibration
  • Varifocal mirror

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Confocal laser displacement sensor using MEMS varifocal mirror'. Together they form a unique fingerprint.

  • Cite this

    Nakazawa, K., Sasaki, T., Furnia, H., Kamiya, J., Sasaki, H., Kamiya, T., & Hane, K. (2017). Confocal laser displacement sensor using MEMS varifocal mirror. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2139-2142). [7994498] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994498