Confocal laser displacement sensor using a micro-machined varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. Here, we propose application of the micro-machined varifocal mirror for the modulation. The varifocal mirror can realize faster modulation, small size, and low energy consumption for the confocal displacement sensor. The electrostatically actuated varifocal mirror made by single crystalline silicon is used. The working distance of the sensor is designed to be 31 mm. The actuating range at 7 kHz is 310 μm. The linearity error in the actuating range is from −1.1% to 1.2%.

Original languageEnglish
Pages (from-to)6911-6916
Number of pages6
JournalApplied optics
Volume56
Issue number24
DOIs
Publication statusPublished - 2017 Aug 20

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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