Fingerprint Dive into the research topics of 'Conditions of micromirror lifted by buckled bridges using film stress'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Conditions of micromirror lifted by buckled bridges using film stress
M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij
Research output: Contribution to conference › Paper › peer-review