Conditions of micromirror lifted by buckled bridges using film stress

M. Sasaki; K. Hane; D. Briand; W. Noell; N. De Rooij

Conditions of micromirror lifted by buckled bridges using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

Abstract

Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.

Original language	English
Pages	1337-1340
Number of pages	4
Publication status	Published - 2008 Dec 1
Event	15th International Display Workshops, IDW '08 - Niigata, Japan Duration: 2008 Dec 3 → 2008 Dec 5

Other

Other	15th International Display Workshops, IDW '08
Country	Japan
City	Niigata
Period	08/12/3 → 08/12/5

ASJC Scopus subject areas

Hardware and Architecture
Human-Computer Interaction
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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title = "Conditions of micromirror lifted by buckled bridges using film stress",

abstract = "Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.",

author = "M. Sasaki and K. Hane and D. Briand and W. Noell and {De Rooij}, N.",

year = "2008",

month = dec,

day = "1",

language = "English",

pages = "1337--1340",

note = "15th International Display Workshops, IDW '08 ; Conference date: 03-12-2008 Through 05-12-2008",

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TY - CONF

T1 - Conditions of micromirror lifted by buckled bridges using film stress

AU - Sasaki, M.

AU - Hane, K.

AU - Briand, D.

AU - Noell, W.

AU - De Rooij, N.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.

AB - Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.

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M3 - Paper

AN - SCOPUS:77954124635

SP - 1337

EP - 1340

T2 - 15th International Display Workshops, IDW '08

Y2 - 3 December 2008 through 5 December 2008

ER -