Abstract
Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.
| Original language | English |
|---|---|
| Pages | 1337-1340 |
| Number of pages | 4 |
| Publication status | Published - 2008 Dec 1 |
| Event | 15th International Display Workshops, IDW '08 - Niigata, Japan Duration: 2008 Dec 3 → 2008 Dec 5 |
Other
| Other | 15th International Display Workshops, IDW '08 |
|---|---|
| Country/Territory | Japan |
| City | Niigata |
| Period | 08/12/3 → 08/12/5 |
ASJC Scopus subject areas
- Hardware and Architecture
- Human-Computer Interaction
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials