Conditions of micromirror lifted by buckled bridges using film stress

M. Sasaki, K. Hane, D. Briand, W. Noell, N. De Rooij

Research output: Contribution to conferencePaperpeer-review

Abstract

Bridges buckled by the film stress can realize three-dimensional structures such as vertical comb drive actuator. We have demonstrated the micromirror lifted by the buckled bridges. The detailed profiles of the buridge and the lifted micromirror are examined. This clears the effect of the bend and the design differences.

Original languageEnglish
Pages1337-1340
Number of pages4
Publication statusPublished - 2008 Dec 1
Event15th International Display Workshops, IDW '08 - Niigata, Japan
Duration: 2008 Dec 32008 Dec 5

Other

Other15th International Display Workshops, IDW '08
Country/TerritoryJapan
CityNiigata
Period08/12/308/12/5

ASJC Scopus subject areas

  • Hardware and Architecture
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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