Concurrent evaluation of strain in heteroepitaxial thin films with continuous lattice mismatch spread

M. Ohtani, Tomoteru Fukumura, M. Kawasaki, K. Omote, T. Kikuchi, J. Harada, H. Koinuma

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

We have developed a way to map out concurrently the in-plane lattice constant of a heteroepitaxial thin film with a spatial resolution of 0.1 mm by using concurrent x-ray diffractometer equipped with a convergent x-ray source and two-dimensional detector. Spatial distribution of heteroepitaxial strain is analyzed for a (BaxSr1-x)TiO3 composition-spread thin film grown on a SrTiO3 substrate. As x increases, elastic deformation caused by compressive stress due to the lattice mismatch forces the lattice of the film to be coherent with that of the substrate until a critical point of x=0.6, above which the film lattice relaxes. By just taking three snap shots of x-ray diffraction image at a symmetric and two asymmetric diffraction configurations, such useful information inherent in heteroepitaxy can be revealed.

Original languageEnglish
Pages (from-to)2066-2068
Number of pages3
JournalApplied Physics Letters
Volume80
Issue number12
DOIs
Publication statusPublished - 2002 Mar 25

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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