Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma

Masaya Shigeta, Hideya Nishiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the present study, the thermofluid field and the electromagnetic field of an advanced RF inductively coupled plasma, which is expected to be utilized for nano metallic-particle synthesis, are investigated. The influence of the operating conditions on the mechanism of the nano metallic-particle synthesis and the finally obtained diameter is clarified by computer simulation.

Original languageEnglish
Title of host publicationSlow Dynamics in Complex Systems
Subtitle of host publication3rd International Symposium on Slow Dynamics in Complex Systems
EditorsMichio Tokuyama, Irwin Oppenheim
PublisherAmerican Institute of Physics Inc.
Pages174-178
Number of pages5
ISBN (Electronic)0735401837
DOIs
Publication statusPublished - 2004 Apr 30
Event3rd International Symposium on Slow Dynamics in Complex Systems - Sendai, Japan
Duration: 2003 Nov 32003 Nov 8

Publication series

NameAIP Conference Proceedings
Volume708
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

Other3rd International Symposium on Slow Dynamics in Complex Systems
CountryJapan
CitySendai
Period03/11/303/11/8

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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