Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma

Masaya Shigeta; Hideya Nishiyama

doi:10.1063/1.1764110

Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma

Masaya Shigeta, Hideya Nishiyama

Creative Flow Research Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In the present study, the thermofluid field and the electromagnetic field of an advanced RF inductively coupled plasma, which is expected to be utilized for nano metallic-particle synthesis, are investigated. The influence of the operating conditions on the mechanism of the nano metallic-particle synthesis and the finally obtained diameter is clarified by computer simulation.

Original language	English
Title of host publication	Slow Dynamics in Complex Systems
Subtitle of host publication	3rd International Symposium on Slow Dynamics in Complex Systems
Editors	Michio Tokuyama, Irwin Oppenheim
Publisher	American Institute of Physics Inc.
Pages	174-178
Number of pages	5
ISBN (Electronic)	0735401837
DOIs	https://doi.org/10.1063/1.1764110
Publication status	Published - 2004 Apr 30
Event	3rd International Symposium on Slow Dynamics in Complex Systems - Sendai, Japan Duration: 2003 Nov 3 → 2003 Nov 8

Publication series

Name	AIP Conference Proceedings
Volume	708
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	3rd International Symposium on Slow Dynamics in Complex Systems
Country	Japan
City	Sendai
Period	03/11/3 → 03/11/8

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.1764110

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Shigeta, M., & Nishiyama, H. (2004). Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma. In M. Tokuyama, & I. Oppenheim (Eds.), Slow Dynamics in Complex Systems: 3rd International Symposium on Slow Dynamics in Complex Systems (pp. 174-178). (AIP Conference Proceedings; Vol. 708). American Institute of Physics Inc.. https://doi.org/10.1063/1.1764110

Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma. / Shigeta, Masaya; Nishiyama, Hideya.

Slow Dynamics in Complex Systems: 3rd International Symposium on Slow Dynamics in Complex Systems. ed. / Michio Tokuyama; Irwin Oppenheim. American Institute of Physics Inc., 2004. p. 174-178 (AIP Conference Proceedings; Vol. 708).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shigeta, M & Nishiyama, H 2004, Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma. in M Tokuyama & I Oppenheim (eds), Slow Dynamics in Complex Systems: 3rd International Symposium on Slow Dynamics in Complex Systems. AIP Conference Proceedings, vol. 708, American Institute of Physics Inc., pp. 174-178, 3rd International Symposium on Slow Dynamics in Complex Systems, Sendai, Japan, 03/11/3. https://doi.org/10.1063/1.1764110

Shigeta M, Nishiyama H. Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma. In Tokuyama M, Oppenheim I, editors, Slow Dynamics in Complex Systems: 3rd International Symposium on Slow Dynamics in Complex Systems. American Institute of Physics Inc. 2004. p. 174-178. (AIP Conference Proceedings). https://doi.org/10.1063/1.1764110

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