Abstract
A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).
Original language | English |
---|---|
Pages (from-to) | 173-178 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 700 |
Publication status | Published - 2002 Jan 1 |
Externally published | Yes |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering