Computer-controlled fabrication of concentric multilayer fresnel zone plate for synchrotron radiation hard X-ray

Masato Yasumoto; Shigeharu Tamura; Nagao Kamijo; Yoshio Suzuki; Mitsuhiro Awaji; Akihisa Takeuchi; Hidekazu Takano; Yoshiki Kohmura; Katsumi Handa

Computer-controlled fabrication of concentric multilayer fresnel zone plate for synchrotron radiation hard X-ray

Masato Yasumoto, Shigeharu Tamura, Nagao Kamijo, Yoshio Suzuki, Mitsuhiro Awaji, Akihisa Takeuchi, Hidekazu Takano, Yoshiki Kohmura, Katsumi Handa

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).

Original language	English
Pages (from-to)	173-178
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	700
Publication status	Published - 2002 Jan 1
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

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title = "Computer-controlled fabrication of concentric multilayer fresnel zone plate for synchrotron radiation hard X-ray",

abstract = "A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).",

author = "Masato Yasumoto and Shigeharu Tamura and Nagao Kamijo and Yoshio Suzuki and Mitsuhiro Awaji and Akihisa Takeuchi and Hidekazu Takano and Yoshiki Kohmura and Katsumi Handa",

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pages = "173--178",

journal = "Materials Research Society Symposium - Proceedings",

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T1 - Computer-controlled fabrication of concentric multilayer fresnel zone plate for synchrotron radiation hard X-ray

AU - Yasumoto, Masato

AU - Tamura, Shigeharu

AU - Kamijo, Nagao

AU - Suzuki, Yoshio

AU - Awaji, Mitsuhiro

AU - Takeuchi, Akihisa

AU - Takano, Hidekazu

AU - Kohmura, Yoshiki

AU - Handa, Katsumi

PY - 2002/1/1

Y1 - 2002/1/1

N2 - A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).

AB - A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).

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JO - Materials Research Society Symposium - Proceedings

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Computer-controlled fabrication of concentric multilayer fresnel zone plate for synchrotron radiation hard X-ray

Abstract

ASJC Scopus subject areas

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